Altair Case Studies Zyvex Corporation: Pioneering 3D MEMS Technology for Nanotech Applications

	Zyvex Corporation: Pioneering 3D MEMS Technology for Nanotech Applications Altair

Zyvex Corporation: Pioneering 3D MEMS Technology for Nanotech Applications

Altair

Technology Category	Sensors - Accelerometers Sensors - Acoustic Sensors
Applicable Industries	Electronics Equipment & Machinery
Applicable Functions	Product Research & Development
Use Cases	Mesh Networks Virtual Prototyping & Product Testing
Services	Hardware Design & Engineering Services System Integration
Challenge	Zyvex Corporation, a leading molecular nanotechnology development company, was faced with the challenge of developing micro-electro-mechanical systems (MEMS) technology that could enable new nanotech applications. The majority of commercially available MEMS devices were essentially two-dimensional, grown onto or etched from a flat substrate. However, Zyvex saw the potential for MEMS technology that provided structures and devices with 3D characteristics. The challenge lay in the manufacturing process. Building a 3D MEMS device required some form of assembly to raise structures from the plane of fabrication and move them into the appropriate position. Conventional assembly methods were costly and alternative methods had limitations. Furthermore, the use of computational analysis was critical to the design of microstructures, as a microfabrication cycle could take up to four months. Read More
About Customer	Zyvex Corporation, based in Richardson, TX, is the first molecular nanotechnology development company and an aggressive developer of commercial nanotech applications. The company has three product lines – materials, tools, and structures – and is focused on three market segments: aerospace and defense; healthcare and medicine; and electronics and semiconductors. Zyvex customers include industry leaders such as Boeing, Easton Sports, Honeywell International, and Texas Instruments. The company is active in several areas of research, funded by grants from state and federal agencies. Read More
Solution	Zyvex Corporation developed a unique approach to overcome these challenges. They designed compliant MEMS components that could be de-tethered, removed from the plane of the wafer, and assembled, all in an automated process. This was achieved through a directed pick-and-place microassembly process using MEMS end-effectors and high-precision robotics. This made it possible to integrate microcomponents that had been fabricated in separate processes. Zyvex also heavily relied on finite-element analysis (FEA) tools in their MEMS design process. These tools allowed them to design, analyze, and test MEMS structures, accelerating their work significantly. They used advanced FEA tools like Altair HyperMesh for more control over the mesh densities and visualization capabilities of post-processing tools like Altair HyperView for understanding the performance and function of MEMS devices. Read More Log in to view content
Contents

Technology Category

Sensors - Accelerometers

Sensors - Acoustic Sensors

Applicable Industries

Electronics

Equipment & Machinery

Applicable Functions

Product Research & Development

Use Cases

Mesh Networks

Virtual Prototyping & Product Testing

Services

Hardware Design & Engineering Services

System Integration

Challenge

Zyvex Corporation, a leading molecular nanotechnology development company, was faced with the challenge of developing micro-electro-mechanical systems (MEMS) technology that could enable new nanotech applications. The majority of commercially available MEMS devices were essentially two-dimensional, grown onto or etched from a flat substrate. However, Zyvex saw the potential for MEMS technology that provided structures and devices with 3D characteristics. The challenge lay in the manufacturing process. Building a 3D MEMS device required some form of assembly to raise structures from the plane of fabrication and move them into the appropriate position. Conventional assembly methods were costly and alternative methods had limitations. Furthermore, the use of computational analysis was critical to the design of microstructures, as a microfabrication cycle could take up to four months.

About Customer

Zyvex Corporation, based in Richardson, TX, is the first molecular nanotechnology development company and an aggressive developer of commercial nanotech applications. The company has three product lines – materials, tools, and structures – and is focused on three market segments: aerospace and defense; healthcare and medicine; and electronics and semiconductors. Zyvex customers include industry leaders such as Boeing, Easton Sports, Honeywell International, and Texas Instruments. The company is active in several areas of research, funded by grants from state and federal agencies.

Solution

Zyvex Corporation developed a unique approach to overcome these challenges. They designed compliant MEMS components that could be de-tethered, removed from the plane of the wafer, and assembled, all in an automated process. This was achieved through a directed pick-and-place microassembly process using MEMS end-effectors and high-precision robotics. This made it possible to integrate microcomponents that had been fabricated in separate processes. Zyvex also heavily relied on finite-element analysis (FEA) tools in their MEMS design process. These tools allowed them to design, analyze, and test MEMS structures, accelerating their work significantly. They used advanced FEA tools like Altair HyperMesh for more control over the mesh densities and visualization capabilities of post-processing tools like Altair HyperView for understanding the performance and function of MEMS devices.

Impact #1	The development and application of Zyvex's unique approach to MEMS technology have resulted in significant operational benefits. The company has been able to pioneer the development of 3D MEMS structures, pushing the boundaries of what is possible in the field of nanotechnology. The use of FEA tools has not only accelerated their work but also provided valuable insights into the performance of their microassembled systems. The visualization capabilities of these tools have been instrumental in understanding the function of MEMS devices and presenting the results of their work to management and funding agencies. Furthermore, the development of a highly miniaturized SEM system offers potential advantages for low-cost, portable SEMs that can be used in the fabrication process for inspection, imaging, high-throughput lithography for mask-making, and direct-write applications using micro-column arrays.

Impact #1

The development and application of Zyvex's unique approach to MEMS technology have resulted in significant operational benefits. The company has been able to pioneer the development of 3D MEMS structures, pushing the boundaries of what is possible in the field of nanotechnology. The use of FEA tools has not only accelerated their work but also provided valuable insights into the performance of their microassembled systems. The visualization capabilities of these tools have been instrumental in understanding the function of MEMS devices and presenting the results of their work to management and funding agencies. Furthermore, the development of a highly miniaturized SEM system offers potential advantages for low-cost, portable SEMs that can be used in the fabrication process for inspection, imaging, high-throughput lithography for mask-making, and direct-write applications using micro-column arrays.

Benefit #1	The use of FEA tools has greatly accelerated Zyvex's work, eliminating the need for a lengthy iterative process.
Benefit #2	The development of a highly miniaturized scanning electron microscopy (SEM) system resulted in a device with a footprint of less than a square centimeter.
Benefit #3	The miniaturized SEM can focus a beam diameter of 30 nanometers.

Benefit #1

The use of FEA tools has greatly accelerated Zyvex's work, eliminating the need for a lengthy iterative process.

Benefit #2

The development of a highly miniaturized scanning electron microscopy (SEM) system resulted in a device with a footprint of less than a square centimeter.

Benefit #3

The miniaturized SEM can focus a beam diameter of 30 nanometers.

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Overview

Zyvex Corporation: Pioneering 3D MEMS Technology for Nanotech Applications

Operational Impact

Quantitative Benefit